Category
Category
Priority: constant volume, constant flow rate dispensing performance
High-pressure Pump Series
● Maintains excellent low-particle performance and bubble discharge capability, while supporting a maximum discharge pressure of 0.5 MPa.
AC Servo Drive CT/PT/HT Pump
● Electrical pump for liquid crystals, PDP, organic EL, and other applications where uniform thin film coating is required. Enables a highly reliable structure and advanced constant flow volume control.
Electric RT pump
● Pump with new RT structure and tube diaphragm along with high response. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)