Category
Category
Pneumatic bellows pump
● Low-priced bellows pump for low-cost air cylinder operation. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)
Pneumatic PT pump
● Structures that combine unique 8-shaped cross sectioned tube with bellows. No moving parts, so there is virtually no particle generation due to pump operation.
Electric bellows pump
● Bellows pump that uses an easy-to-control stepping motor. Media: Photoresist, purified water, chemicals (Combustible matter not allowed.)
Electric CT pump
● Next-generation electrical pumps and constant volume discharge pumps meet the needs of semiconductor wafers for miniaturization. Development of the world's first(Note) CT pump structure enables low dust, better foam release, and simple structure for higher precision.
Electric PT pump
● Structures that combine unique 8-shaped cross sectioned tube with bellows. No moving parts, so there is virtually no particle generation due to pump operation.